Electrical Atomic Force Microscopy for Nanoelectronics /

The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabricatio...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Celano, Umberto (Editor)
Format: eBook
Language:English
Published: Cham : Springer International Publishing : Imprint: Springer, 2019.
Edition:1st ed. 2019.
Series:NanoScience and Technology,
Subjects:
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Call Number: QC450-467QC718.5.S6
 
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