Chemical vapour deposition : precursors, processes and applications /
Chemical Vapour Deposition (CVD) involves the deposition of thin solid films from chemical precursors in the vapour phase, and encompasses a variety of deposition techniques, including a range of thermal processes, plasma enhanced CVD (PECVD), photon- initiated CVD, and atomic layer deposition (ALD)...
| Other Authors: | , |
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| Format: | eBook |
| Language: | English |
| Published: |
Cambridge, UK :
Royal Society of Chemistry,
[2009]
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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