Chemical vapour deposition : precursors, processes and applications /

Chemical Vapour Deposition (CVD) involves the deposition of thin solid films from chemical precursors in the vapour phase, and encompasses a variety of deposition techniques, including a range of thermal processes, plasma enhanced CVD (PECVD), photon- initiated CVD, and atomic layer deposition (ALD)...

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Bibliographic Details

Other Authors:	Hitchman, Michael L., Jones, Anthony C.
Format:	eBook
Language:	English
Published:	Cambridge, UK : Royal Society of Chemistry, [2009]
Subjects:	Chemical vapor deposition. TECHNOLOGY & ENGINEERING > Technical & Manufacturing Industries & Trades. Electronic book. Electronic books.
Online Access:	Connect to the full text of this electronic book