Silicon Technologies : Ion Implantation and Thermal Treatment /
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
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| Format: | eBook |
| Language: | English |
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Wiley,
2011.
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| Edition: | 1st edition. |
| Subjects: | |
| Online Access: | Connect to this electronic resource |
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