Silicon Technologies : Ion Implantation and Thermal Treatment /

The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.

Bibliographic Details

Main Author:	Baudrant, Annie (Author)
Corporate Author:	Safari, an O'Reilly Media Company
Format:	eBook
Language:	English
Published:	Wiley, 2011.
Edition:	1st edition.
Subjects:	Electronic books.
Online Access:	Connect to this electronic resource