Microfabrication for Industrial Applications /

This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industr...

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Bibliographic Details

Main Author:	Luttge, Regina (Author)
Corporate Author:	Safari, an O'Reilly Media Company
Format:	eBook
Language:	English
Published:	William Andrew, 2011.
Edition:	1st edition.
Subjects:	Electronic books.
Online Access:	Connect to this electronic resource