Computational Lithography /
A Unified Summary of the Models and Optimization Methods Used in Computational Lithography Optical lithography is one of the most challenging areas of current integrated circuit manufacturing technology. The semiconductor industry is relying more on resolution enhancement techniques (RETs), since th...
| Main Authors: | , |
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| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
Wiley,
2010.
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| Edition: | 1st edition. |
| Subjects: | |
| Online Access: | Connect to this electronic resource |
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