Handbook of Silicon Based MEMS Materials and Technologies /
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materi...
| Main Authors: | , , , |
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| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
William Andrew,
2010.
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| Edition: | 1st edition. |
| Subjects: | |
| Online Access: | Connect to this electronic resource |
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