Handbook of Silicon Based MEMS Materials and Technologies /

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materi...

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Bibliographic Details

Main Authors:	Lindroos, Veikko (Author), Tilli, Markku (Author), Lehto, Ari (Author), Motooka, Teruaki (Author)
Corporate Author:	Safari, an O'Reilly Media Company
Format:	eBook
Language:	English
Published:	William Andrew, 2010.
Edition:	1st edition.
Subjects:	Electronic books.
Online Access:	Connect to this electronic resource