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Handbook of Silicon Based MEMS Materials and Technologies /

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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materi...

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Bibliographic Details
Main Authors: Lindroos, Veikko (Author), Tilli, Markku (Author), Lehto, Ari (Author), Motooka, Teruaki (Author)
Corporate Author: Safari, an O'Reilly Media Company
Format: eBook
Language:English
Published: William Andrew, 2010.
Edition:1st edition.
Subjects:
Electronic books.
Online Access:Connect to this electronic resource

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