APA (7th ed.) Citation

Lindroos, V., Tilli, M., Lehto, A., & Motooka, T. (2010). Handbook of Silicon Based MEMS Materials and Technologies (1st edition.). William Andrew.

Chicago Style (17th ed.) Citation

Lindroos, Veikko, Markku Tilli, Ari Lehto, and Teruaki Motooka. Handbook of Silicon Based MEMS Materials and Technologies. 1st edition. William Andrew, 2010.

MLA (9th ed.) Citation

Lindroos, Veikko, et al. Handbook of Silicon Based MEMS Materials and Technologies. 1st edition. William Andrew, 2010.