Ferroelectric Dielectrics Integrated on Silicon /

This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies. After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book emph...

Full description

Bibliographic Details

Main Author:	Defaÿ, Emmanuel (Author)
Corporate Author:	Safari, an O'Reilly Media Company
Format:	eBook
Language:	English
Published:	Wiley, 2011.
Edition:	1st edition.
Subjects:	Electronic books.
Online Access:	Connect to this electronic resource