Developments in Surface Contamination and Cleaning, Volume 8 /

As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a wh...

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Bibliographic Details

Main Authors:	Kohli, Rajiv (Author), Mittal, Kashmiri (Author)
Corporate Author:	Safari, an O'Reilly Media Company
Format:	eBook
Language:	English
Published:	William Andrew, 2015.
Edition:	1st edition.
Subjects:	Electronic books.
Online Access:	Connect to this electronic resource