Metrology and diagnostic techniques for nanoelectronics /
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| Format: | eBook |
| Language: | English |
| Published: |
Singapore :
Pan Stanford Publishing,
[2017]
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| Online Access: | Connect to the full text of this electronic book |
Table of Contents:
- Model-based scanning electron microscopy critical-dimension metrology for 3D nanostructures
- X-ray metrology for semiconductor fabrication
- Advancements in ellipsometric and scatteronmetric analysis
- 3D-AFM measurements for semiconductor structures and devices
- SIMS analysis on the transistor scale: probing composition and dopants in nonplanar, confined 3D volumes
- Transistor strain measurement techniques and their applications
- Scanning spreading resistance microscopy (SSRM): high-resolution 2D and 3D carrier mapping of semiconductor nanostructures
- Microstructure characterization of nanoscale materials and interconnects
- Characterization of the chemistry and mechanical properties of interconnect materials and interfaces: impact on interconnect reliability
- Characterization of plasma damage for low-k dielectric films
- Defect characterization and metrology
- 3D electron tomography for nanostructures
- Electron energy loss spectroscopy of semiconductor nanostructures and oxides
- Atom probe tomography of semiconductor nanostructures
- Characterization and metrology for graphene materials, structures, and devices
- Characterization of magnetic nanostructures for spin-torque memory applications with marco- and microscale ferromagnetic resonance
- Band alignment measurement by internal photoemission spectroscopy
- Electrical characterization of nanoscale transistors: emphasis on traps associated with MOS gate stacks
- Charge pumping for reliability characterization and testing of nanoelectronic devices
- Application of in situ resistance and nanocalorimetry measurements for nanoelectroinc thin-film materials
- Methodology and challenges in characterization of 3D package interconnection materials and processes
- 3D interconnect characterization using raman spectroscopy
- Advances in 3D interconnect characterization techniques for fault isolation and defect imaging
- Optical and electrical nanoprobing for circuit diagnostics
- Automated tools for methods for debug and diagnosis.