Metrology and diagnostic techniques for nanoelectronics /
| Corporate Author: | |
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Singapore :
Pan Stanford Publishing,
[2017]
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | 1 online resource. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781351733953 1351733958 9789814745093 981474509X |