Metrology and diagnostic techniques for nanoelectronics /

Bibliographic Details
Corporate Author: Taylor & Francis
Other Authors: Ma, Zhiyong, 1950- (Editor), Seiler, David G. (Editor)
Format: eBook
Language:English
Published: Singapore : Pan Stanford Publishing, [2017]
Subjects:
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:1 online resource.
Bibliography:Includes bibliographical references and index.
ISBN:9781351733953
1351733958
9789814745093
981474509X