Development of a photoelectrochemical etch process to enable heterogeneous substrate integration of epitaxial III-nitride semiconductors /

Bibliographic Details
Main Author: Parameshwaran, Vijay (Author)
Format: Government Document eBook
Language:English
Published: Adelphi, MD : US Army Research Laboratory, December 2017.
Subjects:
Online Access:https://purl.fdlp.gov/GPO/gpo116815
Description
Item Description:"ARL-TR-8228."
"Dec 2017."
Includes tables.
Physical Description:1 online resource (vi, 10 pages) : illustrations
Bibliography:Includes bibliographical references (page 8).