A proposed interim check for field testing a laser tracker's 3-D length measurement capability using a calibrated scale bar as a reference artifact /
| Corporate Author: | Physical Measurement Laboratory (National Institute of Standards and Technology (U.S.)). Semiconductor and Dimensional Metrology Division |
|---|---|
| Other Authors: | Blackburn, Christopher, Hudlemeyer, Aaron, Lee, Vincent D., Meruet, Mark, Muralikrishnan, Bala, Sawyer, Daniel |
| Format: | Government Document Book |
| Language: | English |
| Published: |
Gaithersburg, MD :
U.S. Dept. of Commerce, National Institute of Standards and Technology,
2014.
|
| Series: | NISTIR ;
8016. |
| Subjects: | |
| Online Access: | https://purl.fdlp.gov/GPO/gpo94776 |
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