Bibliographic Details
| Corporate Author: |
Physical Measurement Laboratory (National Institute of Standards and Technology (U.S.)). Semiconductor and Dimensional Metrology Division |
| Other Authors: |
Blackburn, Christopher,
Hudlemeyer, Aaron,
Lee, Vincent D.,
Meruet, Mark,
Muralikrishnan, Bala,
Sawyer, Daniel |
| Format: | Government Document
Book
|
| Language: | English |
| Published: |
Gaithersburg, MD :
U.S. Dept. of Commerce, National Institute of Standards and Technology,
2014.
|
| Series: | NISTIR ;
8016.
|
| Subjects: | |
| Online Access: | https://purl.fdlp.gov/GPO/gpo94776
|