Semiconductor Microelectronics and Nanoelectronics Programs /

Bibliographic Details

Main Author:	Pinillos, Joaquin V. Martinez de
Corporate Author:	National Institute of Standards and Technology (U.S.)
Other Authors:	Buckley, Michele, Obeng, Yaw S.
Format:	Government Document eBook
Language:	English
Published:	Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2010.
Series:	NISTIR ; 7686.
Online Access:	https://purl.fdlp.gov/GPO/gpo99427