Semiconductor microelectronics and nanoelectronics programs /

Bibliographic Details

Corporate Author:	National Institute of Standards and Technology (U.S.)
Format:	Government Document eBook
Language:	English
Published:	Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2005.
Series:	NISTIR ; 7235.
Online Access:	https://purl.fdlp.gov/GPO/gpo101415