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Workshop summary report : scanning probe nanolithography workshop /

Bibliographic Details
Corporate Author: Manufacturing Engineering Laboratory (U.S.)
Other Authors: Dagata, John A., Perez-Murano, Francesc, Yokoyama, Hiroshi
Format: Government Document eBook
Language:English
Published: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2003]
Series:NISTIR ; 7040.
Subjects:
Nanoelectronics.
Online Access:https://purl.fdlp.gov/GPO/gpo96144
Description
Item Description:"January 2003."
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from page [1], viewed April 6, 2007.
Electronic resource.
Physical Description:1 online resource (86 pages) : illustrations.
Bibliography:Includes bibliographical references.