Workshop summary report : scanning probe nanolithography workshop /

Bibliographic Details

Corporate Author:	Manufacturing Engineering Laboratory (U.S.)
Other Authors:	Dagata, John A., Perez-Murano, Francesc, Yokoyama, Hiroshi
Format:	Government Document eBook
Language:	English
Published:	[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2003]
Series:	NISTIR ; 7040.
Subjects:	Nanoelectronics.
Online Access:	https://purl.fdlp.gov/GPO/gpo96144