Manufacturing Engineering Laboratory (U.S.), Dagata, J. A., Perez-Murano, F., & Yokoyama, H. (2003). Workshop summary report: Scanning probe nanolithography workshop. U.S. Dept. of Commerce, National Institute of Standards and Technology.
Chicago Style (17th ed.) CitationManufacturing Engineering Laboratory (U.S.), John A. Dagata, Francesc Perez-Murano, and Hiroshi Yokoyama. Workshop Summary Report: Scanning Probe Nanolithography Workshop. [Gaithersburg, MD]: U.S. Dept. of Commerce, National Institute of Standards and Technology, 2003.
MLA (9th ed.) CitationManufacturing Engineering Laboratory (U.S.), et al. Workshop Summary Report: Scanning Probe Nanolithography Workshop. U.S. Dept. of Commerce, National Institute of Standards and Technology, 2003.
Warning: These citations may not always be 100% accurate.