Fundamentals of microfabrication and nanotechnology /

Bibliographic Details

Main Author:	Madou, Marc J. (Author)
Corporate Author:	Taylor & Francis
Format:	eBook
Language:	English
Published:	Boca Raton, FL : CRC Press, [2011]
Edition:	Third edition.
Subjects:	Microelectromechanical systems. Nanoelectromechanical systems. Electronic books.
Online Access:	Connect to the full text of this electronic book