Metal impurities in silicon- and germanium-based technologies : origin, characterization, control, and device impact /
| Main Authors: | , |
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| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
Cham, Switzerland :
Springer,
2018.
|
| Series: | Springer series in materials science ;
v. 270. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
|---|---|
| Physical Description: | 1 online resource. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9783319939254 3319939254 |
| ISSN: | 0933-033X ; |