Metal impurities in silicon- and germanium-based technologies : origin, characterization, control, and device impact /
| Main Authors: | , |
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| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
Cham, Switzerland :
Springer,
2018.
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| Series: | Springer series in materials science ;
v. 270. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
Internet
Connect to the full text of this electronic bookAvailable Online
| Call Number: |
TA459 .C53 2018 |
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|---|---|---|
| Call Number | Status | Get It |
| TA459 .C53 2018 | Available | |