Cover Image

Characterization of silicon-gate CMOS/SOS integrated circuits processed with ion implantation /

Bibliographic Details
Main Author: Woo, D. S. (Author)
Corporate Author: Solid State Technology Center (RCA Corporation)
Format: Government Document eBook
Language:English
Published: Marshall Space Flight Center, AL : George C. Marshall Space Flight Center, January 1982.
Series:NASA contractor report ; NASA CR-161988.
Subjects:
Computer aided design.
Coding.
Ion implantation.
Masks.
Electron beams.
Online Access:https://purl.fdlp.gov/GPO/gpo107986
Description
Item Description:"January 1982."
Physical Description:1 online resource (v, 12 pages, 1 unnumbered page) : illustrations.
Bibliography:Includes bibliographical reference (page 11).