Characterization of silicon-gate CMOS/SOS integrated circuits processed with ion implantation /

Bibliographic Details

Main Author:	Woo, D. S. (Author)
Corporate Author:	Solid State Technology Center (RCA Corporation)
Format:	Government Document eBook
Language:	English
Published:	Marshall Space Flight Center, AL : George C. Marshall Space Flight Center, January 1982.
Series:	NASA contractor report ; NASA CR-161988.
Subjects:	Computer aided design. Coding. Ion implantation. Masks. Electron beams.
Online Access:	https://purl.fdlp.gov/GPO/gpo107986