Micro Electro Mechanical Systems /

This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, po...

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Bibliographic Details

Corporate Author:	SpringerLink (Online service)
Other Authors:	Huang, Qing-An (Editor)
Format:	eBook
Language:	English
Published:	Singapore : Springer Singapore : Imprint: Springer, 2018.
Series:	Micro/Nano Technologies.
Subjects:	Engineering. Electronics. Microwaves. Mechatronics. Nanotechnology and Microengineering. Electronics and Microelectronics, Instrumentation. Microwaves, RF and Optical Engineering. Electronic books.
Online Access:	Connect to the full text of this electronic book