APA (7th ed.) Citation

Yen, A., & Yu, S. (2018). Optical physics for nanolithography. SPIE Press.

Chicago Style (17th ed.) Citation

Yen, Anthony, and Shinn-Sheng Yu. Optical Physics for Nanolithography. Bellingham, Washington: SPIE Press, 2018.

MLA (9th ed.) Citation

Yen, Anthony, and Shinn-Sheng Yu. Optical Physics for Nanolithography. SPIE Press, 2018.