Fabrication of 3D silicon-based photonic crystal structure with "single" self aligned etching process /

Bibliographic Details

Main Authors:	Dang, Gerard (Author), Taysing-Lara, Monica (Author), Zhou, Weimin (Physicist) (Author)
Format:	Government Document eBook
Language:	English
Published:	Adelphi, MD : Army Research Laboratory, September 2010.
Series:	ARL-TN ; 407.
Subjects:	Photonic crystals. Nanostructured materials.
Online Access:	https://purl.fdlp.gov/GPO/gpo84513