Experimental performance of a micromachined heat flux sensor /

Bibliographic Details

Main Authors:	Stefanescu, S. (Author), DeAnna, Russell G. (Author), Mehregany, M. (Author)
Corporate Author:	U.S. Army Research Laboratory
Format:	Government Document eBook
Language:	English
Published:	Cleveland, Ohio : National Aeronautics and Space Administration, Lewis Research Center, April 1998.
Series:	NASA technical memorandum ; 107517.
Subjects:	Micromachining. Miniaturization. Fabrication. Polyimides. Thin films.
Online Access:	https://purl.fdlp.gov/GPO/gpo82991