Chemical vapour deposition : precursors, processes and applications /
| Corporate Author: | Knovel (Firm) |
|---|---|
| Other Authors: | Jones, Anthony C., Hitchman, Michael L. |
| Format: | eBook |
| Language: | English |
| Published: |
Cambridge, UK :
Royal Society of Chemistry,
[2009]
|
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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