Chemical vapour deposition : precursors, processes and applications /

Bibliographic Details
Corporate Author:	Knovel (Firm)
Other Authors:	Jones, Anthony C., Hitchman, Michael L.
Format:	eBook
Language:	English
Published:	Cambridge, UK : Royal Society of Chemistry, [2009]
Subjects:	Chemical vapor deposition. TECHNOLOGY & ENGINEERING > Technical & Manufacturing Industries & Trades. Electronic books.
Online Access:	Connect to the full text of this electronic book

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