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Chemical vapour deposition : precursors, processes and applications /

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Bibliographic Details
Corporate Author: Knovel (Firm)
Other Authors: Jones, Anthony C., Hitchman, Michael L.
Format: eBook
Language:English
Published: Cambridge, UK : Royal Society of Chemistry, [2009]
Subjects:
Chemical vapor deposition.
TECHNOLOGY & ENGINEERING > Technical & Manufacturing Industries & Trades.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:1 online resource (xv, 582 pages) : illustrations, plans
Bibliography:Includes bibliographical references and index.
ISBN:9781847558794
1847558798
9781621987031
1621987035
0854044655
9780854044658