Advances in CMP/polishing technologies for the manufacture of electronic devices /
| Corporate Author: | |
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| Other Authors: | , , |
| Format: | eBook |
| Language: | English |
| Published: |
Oxford :
Elsevier,
2012.
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| Edition: | 1st ed. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Abstract: | CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. --P. 4 of cover. |
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| Item Description: | Electronic resource. |
| Physical Description: | 1 online resource (xii, 317 pages) : illustrations, color portraits |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781437778601 1437778607 |