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Developments in surface contamination and cleaning. Volume three, Methods for removal of particle contaminants /

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The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate mater...

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Bibliographic Details
Corporate Author: Knovel (Firm)
Other Authors: Kohli, Rajiv, Mittal, Kashmiri L.
Format: eBook
Language:English
Published: Oxford ; Burlington, MA : William Andrew, [2011]
Edition:1st ed.
Subjects:
Surfaces (Technology)
Surface contamination > Prevention.
Particles > Measurement.
Cleaning.
Coatings.
Dust control.
TECHNOLOGY & ENGINEERING > Nanotechnology & MEMS.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Summary:The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate materials is driving continuous development of the established cleaning methods and alternative innovative methods for particle removal. This book provides information on the latest developments in this topic area. The purpose of the Developments in Surface Contamination and Cleaning series is to provide.
Item Description:Electronic resource.
Physical Description:1 online resource
Bibliography:Includes bibliographical references and index.
ISBN:9781437778861
1437778860
1437778852
9781437778854