Developments in surface contamination and cleaning. Volume three, Methods for removal of particle contaminants /

The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate mater...

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Bibliographic Details

Corporate Author:	Knovel (Firm)
Other Authors:	Kohli, Rajiv, Mittal, Kashmiri L.
Format:	eBook
Language:	English
Published:	Oxford ; Burlington, MA : William Andrew, [2011]
Edition:	1st ed.
Subjects:	Surfaces (Technology) Surface contamination > Prevention. Particles > Measurement. Cleaning. Coatings. Dust control. TECHNOLOGY & ENGINEERING > Nanotechnology & MEMS. Electronic books.
Online Access:	Connect to the full text of this electronic book