Physics of radio-frequency plasmas /
"Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on phy...
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| Format: | eBook |
| Language: | English |
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Cambridge ; New York :
Cambridge University Press,
2011.
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| Online Access: | Connect to the full text of this electronic book |
| Summary: | "Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics, including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations"-- |
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| Item Description: | Electronic resource. |
| Physical Description: | 1 online resource (viii, 385 pages) : illustrations |
| Bibliography: | Includes bibliographical references (pages 375-382) and index. |
| ISBN: | 9780511861017 051186101X 9780511974342 0511974345 9780511856662 0511856660 |