Physics of radio-frequency plasmas /

"Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on phy...

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Bibliographic Details

Main Author:	Chabert, Pascal, 1969-
Corporate Author:	Knovel (Firm)
Other Authors:	Braithwaite, Nicholas (Nicholas St. J.)
Format:	eBook
Language:	English
Published:	Cambridge ; New York : Cambridge University Press, 2011.
Subjects:	Low temperature plasmas. Radio frequency. SCIENCE > Physics. TECHNOLOGY & ENGINEERING > Mechanical. Electronic books.
Online Access:	Connect to the full text of this electronic book