Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis /
| Corporate Author: | |
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| Other Authors: | , , |
| Format: | eBook |
| Language: | English |
| Published: |
Westwood, N.J. :
Noyes Publications,
[1989]
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| Edition: | Reprint ed. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | 1 online resource (xviii, 438 pages) : illustrations |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 1591249791 9781591249795 |