Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis /

Bibliographic Details
Corporate Author:	Knovel (Firm)
Other Authors:	Cuomo, J. J., Rossnagel, Stephen M., Kaufman, Harold R.
Format:	eBook
Language:	English
Published:	Westwood, N.J. : Noyes Publications, [1989]
Edition:	Reprint ed.
Subjects:	Ion implantation. Ion bombardment > Industrial applications. Ions > Implantation. Bombardement ionique > Applications industrielles. Electronic books.
Online Access:	Connect to the full text of this electronic book

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