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Lithography process control /

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This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process...

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Bibliographic Details
Main Author: Levinson, Harry J.
Corporate Author: Knovel (Firm)
Format: eBook
Language:English
Published: Bellingham, Wash. : SPIE Optical Engineering Press, [1999]
Series:Tutorial texts in optical engineering ; v. TT 28.
Subjects:
Semiconductors > Etching.
Microlithography > Quality control.
Semiconducteurs > Attaque chimique.
Microlithographie > Qualité > Contrôle.
TECHNOLOGY & ENGINEERING > Mechanical.
Microlithographie.
Commande de processus.
Semiconducteurs > Qualité > Contrôle.
Lithographie (Halbleitertechnologie)
Statistische Prozesslenkung.
Electronic books.
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Call Number: TK7871.85 .L464 1999eb
 
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TK7871.85 .L464 1999eb Available