Ionized-cluster beam deposition and epitaxy /
The technique of ionized-cluster beam (ICB) deposition, the fundamentals of ICB technology, and technical applications of thin films produced by ICB deposition are presented for those interested or working in the field. ICB processes are characterized, and equipment is available. The films deposited...
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| Format: | eBook |
| Language: | English |
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Park Ridge, N.J., U.S.A. :
Noyes Publications,
[1988]
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| Series: | Materials science and process technology series.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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