Ionized-cluster beam deposition and epitaxy /

The technique of ionized-cluster beam (ICB) deposition, the fundamentals of ICB technology, and technical applications of thin films produced by ICB deposition are presented for those interested or working in the field. ICB processes are characterized, and equipment is available. The films deposited...

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Bibliographic Details

Main Author:	Takagi, Toshinori
Corporate Author:	Knovel (Firm)
Format:	eBook
Language:	English
Published:	Park Ridge, N.J., U.S.A. : Noyes Publications, [1988]
Series:	Materials science and process technology series.
Subjects:	Epitaxy. Thin film devices > Design and construction. Couches minces. Epitaxie. Electronic books.
Online Access:	Connect to the full text of this electronic book