Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control /
Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processin...
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| Format: | eBook |
| Language: | English |
| Published: |
Westwood, N.J. :
Noyes Publications,
[1998]
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| Online Access: | Connect to the full text of this electronic book |
| Summary: | Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processing. Also covers the more widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. |
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| Item Description: | Electronic resource. |
| Physical Description: | 1 online resource (xxvii, 917 pages) : illustrations |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 1591240794 9781591240792 9780815514220 0815514220 |