Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control /

Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processin...

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Bibliographic Details
Main Author: Mattox, D. M.
Corporate Author: Knovel (Firm)
Format: eBook
Language:English
Published: Westwood, N.J. : Noyes Publications, [1998]
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Call Number: TS695 .M38 1998eb
 
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TS695 .M38 1998eb Available