Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
An overview of the technology that describes the advantages provided by plasmas, plasma fundamentals, and a range of plasma processes relevant to the deposition and etching of thin films for microelectronics and other fields.
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| Other Authors: | , , |
| Format: | eBook |
| Language: | English |
| Published: |
Park Ridge, N.J. :
Noyes Publications,
[1990]
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| Series: | Materials science and process technology series.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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