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Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications /

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The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers...

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Bibliographic Details
Corporate Author: Knovel (Firm)
Other Authors: Seshan, Krishna
Format: eBook
Language:English
Published: Norwich, N.Y. : Noyes Publications/William Andrew Pub., [2002]
Edition:2nd ed.
Series:Materials science and process technology series. Electronic materials and process technology.
Subjects:
Thin film devices > Design and construction > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc.
Chemical vapor deposition > Handbooks, manuals, etc.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Chemical vapor deposition.
Thin film devices > Design and construction.
Thin films.
Filmes finos (equipamentos)
Electronic books.
Handbooks and manuals.
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Call Number: TK7872.T55 H36 2002eb
 
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