Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI) /

A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology.

Bibliographic Details
Corporate Author: Knovel (Firm)
Other Authors: McGuire, G. E.
Format: eBook
Language:English
Published: Park Ridge, N.J. : Noyes Publicatons, [1988]
Series:Materials science and process technology series.
Subjects:
Online Access:Connect to the full text of this electronic book
Description
Summary:A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology.
Item Description:Electronic resource.
Physical Description:1 online resource (xiii, 675 pages) : illustrations.
Format:Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Bibliography:Includes bibliographical references and index.
ISBN:1591242525
9781591242529
9780815518969
081551896X
0815511507
9780815511502