Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI) /
A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology.
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| Format: | eBook |
| Language: | English |
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Park Ridge, N.J. :
Noyes Publicatons,
[1988]
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| Series: | Materials science and process technology series.
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| Online Access: | Connect to the full text of this electronic book |
| Summary: | A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology. |
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| Item Description: | Electronic resource. |
| Physical Description: | 1 online resource (xiii, 675 pages) : illustrations. |
| Format: | Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 1591242525 9781591242529 9780815518969 081551896X 0815511507 9780815511502 |